Conveying of critical Fumes Application Description:
Safe conveying of critical fumes generated during wet etch wafer processing to scrubber units Customer:
What was the aim of the Project?
~15% direct cost savings What are the needs / requirements?
Metal/corrosion free system. Easy planning installation. Easy upgrade/repair. No leakage compared to PTFE gasket cold flow at coated SS systems. What has been installed before?
PTFE coated SS pipes Key Findings:
Economical state-of-the-art solution for conveying critical fumes within Microelectronics applications. S14 fire risk assessment had to be conducted in order to prove compliance for cleanroom installation. FM4910 compliance has been assessed to be sufficient until dm400mm. For larger sizes d>400mm compliance to FM4922 has been assessed to be mandatory and a coated SS system has been installed. Benefits and advantages for OEMs and end customer:
Direct saving compared to coated SS systems. Particle free (no metal particles during installation, upgrade and service life). Indirect savings during planning, installation and upgrade (>20% compared to coated SS) Pay-off for the customer:
Reduced costs (planning, installation, service), no downtime because of corrosion resistant system
Date of Installation: 2005
Media: Corrosive fumes containing wet etch chemicals Ambience: Cleanroom, Clean Sub-Fab, Sub-Fab Material: PVDF Products: SYGEF® PVDF, Pipes and Fittings
Very satisfied about corrosion free solution and no maintenance in the future combined with easy upgrade possibility and better cost to performance ratio compared to coated SS.